JPH031478Y2 - - Google Patents
Info
- Publication number
- JPH031478Y2 JPH031478Y2 JP20394783U JP20394783U JPH031478Y2 JP H031478 Y2 JPH031478 Y2 JP H031478Y2 JP 20394783 U JP20394783 U JP 20394783U JP 20394783 U JP20394783 U JP 20394783U JP H031478 Y2 JPH031478 Y2 JP H031478Y2
- Authority
- JP
- Japan
- Prior art keywords
- storage device
- substrate
- grooves
- substrates
- auxiliary storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003860 storage Methods 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 51
- 239000010408 film Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 230000004308 accommodation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- -1 etc. Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20394783U JPS60110464U (ja) | 1983-12-28 | 1983-12-28 | 基板収容装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20394783U JPS60110464U (ja) | 1983-12-28 | 1983-12-28 | 基板収容装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60110464U JPS60110464U (ja) | 1985-07-26 |
| JPH031478Y2 true JPH031478Y2 (en]) | 1991-01-17 |
Family
ID=30766351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20394783U Granted JPS60110464U (ja) | 1983-12-28 | 1983-12-28 | 基板収容装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60110464U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0715146B2 (ja) * | 1987-08-03 | 1995-02-22 | キヤノン株式会社 | 堆積膜形成方法 |
-
1983
- 1983-12-28 JP JP20394783U patent/JPS60110464U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60110464U (ja) | 1985-07-26 |
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